Two-dimensional Green`s function Poisson solution appropriate for cylindrical-symmetry simulations
This report describes the numerical procedure used to implement the Green`s function method for solving the Poisson equation in two-dimensional (r,z) cylindrical coordinates. The procedure can determine the solution to a problem with any or all of the applied voltage boundary conditions, dielectric media, floating (insulated) conducting media, dielectric surface charging, and volumetric space charge. The numerical solution is reasonably fast, and the dimension of the linear problem to be solved is that of the number of elements needed to represent the surfaces, not the whole computational volume. The method of solution is useful in the simulation of plasma particle motion in the vicinity of complex surface structures as found in microelectronics plasma processing applications. This report is a stand-alone supplement to the previous Sandia Technical Report SAND98-0537 presenting the two-dimensional Cartesian Poisson solver.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 674827
- Report Number(s):
- SAND-98-0755; ON: DE99000465; BR: DP0102011; TRN: AHC29820%%282
- Resource Relation:
- Other Information: PBD: Apr 1998
- Country of Publication:
- United States
- Language:
- English
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