The pumping of hydrogen and helium by sputter-ion pumps

Conference · Wed Jan 01 00:00:00 EST 1992

OSTI ID:6475687

Welch, K M; Pate, D J; Todd, R J

The pumping of hydrogen in diode and triode sputter-ion pumps is discussed. The type of cathode material used in these pumps is shown to have a significant impact on the effectiveness with which hydrogen is pumped. Examples of this include data for pumps with aluminum and titanium-alloy cathodes. Diode pumps with aluminum cathodes are shown to be no more effective in the pumping of hydrogen than in the pumping of helium. The use of titanium or titanium alloy anodes is also shown to measurably impact on the speed of these pumps at.very low pressures. This stems from the fact that hydrogen is [times]10[sup 6] more soluble in titanium than in stainless steel. Hydrogen becomes resident in the anodes because of fast neutral burial. Lastly, quantitative data are given for the He speeds and capacities of both noble and conventional diode and triode pumps. The effectiveness of various pump regeneration procedures, subsequent to the pumping of He, is reported.These included bakeout and N[sub 2] glow discharge cleaning. The comparative desorption of He with the subsequent pumping of N[sub 2] is reported on. The N[sub 2] speed of these pumps was used as the benchmark for defining the size of the pumps vs. their respective He speeds.

• Research Organization: Brookhaven National Lab., Upton, NY (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6475687
• Report Number(s): BNL-47435-Rev.3/93; CONF-921129-9-Rev.3/93; ON: DE93012529
• Resource Relation: Conference: 39. national symposium of the American Vacuum Society, Chicago, IL (United States), 9-13 Nov 1992
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BROOKHAVEN RHIC
SPUTTER-ION PUMPS
HELIUM
PUMPING
HYDROGEN
ALUMINIUM BASE ALLOYS
CATHODES
TITANIUM BASE ALLOYS
ACCELERATORS
ALLOYS
ALUMINIUM ALLOYS
ELECTRODES
ELEMENTS
EQUIPMENT
FLUIDS
GASES
HEAVY ION ACCELERATORS
LABORATORY EQUIPMENT
NONMETALS
PUMPS
RARE GASES
STORAGE RINGS
TITANIUM ALLOYS
VACUUM PUMPS
430303* - Particle Accelerators- Experimental Facilities & Equipment