Gigabit chips: A case history of a transfer of federal technology

Conference · Thu Jan 01 00:00:00 EST 1987

OSTI ID:6153190

Marcuse, W

This report discusses the need for industry/government cooperation in developing new semiconductor technology. In order to increase memory density of chips from 1M bit, it is necessary to use a process other than optical lithography for production. The technique considered here is x-ray lithography. Industry is currently found to be unwilling or unable to finance research into this technology. If US industry is to remain competitive in the world semiconductor market, it is concluded that the government must cooperate and support work in this area. 16 refs. (JDH)

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6153190
• Report Number(s): BNL-39708; CONF-8706111-1; ON: DE87010368
• Resource Relation: Conference: 12. annual meeting and international symposium of the Technology Transfer Society, Washington, DC, USA, 22 Jun 1987; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
29 ENERGY PLANNING
POLICY AND ECONOMY
SEMICONDUCTOR STORAGE DEVICES
FABRICATION
TECHNOLOGY TRANSFER
INDUSTRY
SYNCHROTRON RADIATION
X-RAY EQUIPMENT
BREMSSTRAHLUNG
ELECTROMAGNETIC RADIATION
EQUIPMENT
MEMORY DEVICES
RADIATIONS
SEMICONDUCTOR DEVICES
420800* - Engineering- Electronic Circuits & Devices- (-1989)
290500 - Energy Planning & Policy- Research
Development
Demonstration
& Commercialization