Ge-Au eutectic bonding of Ge {l_brace}100{r_brace} single crystals

Conference · Sun Aug 01 00:00:00 EDT 1993

OSTI ID:10192496

Knowlton, W B; Beeman, J W; Emes, J H; Loretto, D ^[1]; Itoh, K M; Haller, E E ^[1]

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1. Lawrence Berkeley Lab., CA (United States)

We present preliminary results on eutectic bonding between two (100) Ge single crystal surfaces using thin films of Au ranging from 900{Angstrom}/surface and Pd(10% the thickness of Au). Following bonding, plan view optical microscopy (OM) of the cleaved interface of samples with Au thicknesses {le} 500{Angstrom}/surface show a eutectic morphology more conducive to phonon transmission through the bond interface. High resolution transmission electron microscopy (HRTEM) cross sectional interface studies of a 300{Angstrom}/surface Au sample show <100> epitaxial growth of Ge. In sections of the bond, lattice continuity of the Ge is apparent through the interface. TEM studies also reveal <110> heteroepitaxial growth of Au with a Au-Ge lattice mismatch of less than 2%. Eutectic bonds with 200{Angstrom}/surface Au have been attained with characterization pending. An optical polishing technique for Ge has been optimized to insure intimate contact between the Ge surfaces prior to bonding. Interferometry analysis of the optically polished Ge surface shows that surface height fluctuations lie within {plus_minus}150{Angstrom} across an interval of 1mm. Characterization of phonon transmission through the interface is discussed with respect to low temperature detection of ballistic phonons.

• Research Organization: Lawrence Berkeley Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States); National Aeronautics and Space Administration, Washington, DC (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 10192496
• Report Number(s): LBL-34447; CONF-930751-1; ON: DE94002281; CNN: Contract ADT-8809616; Contract W17605
• Resource Relation: Conference: 5. international workshop on low temperature detectors,Berkeley, CA (United States),29 Jul - 3 Aug 1993; Other Information: PBD: Aug 1993
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
NONLUMINOUS MATTER
DETECTION
GERMANIUM
BONDING
MONOCRYSTALS
EUTECTICS
GOLD
PHONONS
GE SEMICONDUCTOR DETECTORS
ANTENNAS
THERMISTORS
440100
661300
RADIATION INSTRUMENTATION
OTHER ASPECTS OF PHYSICAL SCIENCE