Phase conjugated lasers applied to commercial x-ray lithography
Over the last 20 years lasers have been a useful tool in the generation of x-ray radiation. Recent technology advances have allowed solid state lasers to be designed as a drive source for proximity print x-ray lithography systems as well as in the longer term for soft x-ray projection lithography systems. In addition the ability to build multi-hundred joule per pulse, several nanosecond pulselength lasers with repetition rate capability and table top size now allow us to design table top x-ray sources and x-ray lasers. Within our laboratory we have been building several high power solid state lasers for direct application to these systems. We find that the best performance of these high power lasers is obtained when we include non-linear phase conjugate mirrors. These mirrors function in two important respects; they provide a means to obtain very high beam brightness without the generation of hot spots which damage optical components and in addition because of their threshold activation characteristic they function in the role of multistage gain isolators. In this lecture we will describe in detail the design and performance of two systems which are being hardened for commercialization and a third system which is in the design phase and will be used as a pump source for an x-ray laser.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 10189882
- Report Number(s):
- UCRL-JC-114058; CONF-9308186-2; ON: DE94001529
- Resource Relation:
- Conference: 2. international school and topical meeting on applications of nonlinear optics,Prague (Czech Republic),16-20 Aug 1993; Other Information: PBD: 1 Jun 1993
- Country of Publication:
- United States
- Language:
- English
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