A novel heterodyne displacement interferometer with no detectable periodic nonlinearity and optical resolution doubling

Conference · Fri Feb 05 00:00:00 EST 2010

OSTI ID:983379

Joo, K; Ellis, J D; Buice, E S; Spronck, J W; Munnig Schmidt, R H

This paper describes a novel heterodyne laser interferometer with no significant periodic nonlinearity for linear displacement measurements. Moreover, the optical configurations have the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Experimental results show no discernable periodic nonlinearity for a retro-reflector interferometer and plane mirror interferometer configurations with a noise level below 20 pm. The incoming laser beams of the interferometers are achieved by utilizing two single mode optical fibers. To determine the stability of the optical fiber couplers a fiber delivery prototype was also built and tested.

• Research Organization: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 983379
• Report Number(s): LLNL-PROC-423527; TRN: US201014%%302
• Resource Relation: Conference: Presented at: 10th Internation Conference of the European Society for Precision Engineering and Nanotechnology, Deft, Netherlands, May 31 - Jun 04, 2010
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
71 CLASSICAL AND QUANTUMM MECHANICS
GENERAL PHYSICS
ACCURACY
FIBERS
INTERFEROMETERS
LASERS
MIRRORS
OPTICAL FIBERS
RESOLUTION
STABILITY