Using aberration test patterns to optimize the performance of EUV aerial imaging microscopes
Journal Article
·
· Journal of Vacuum Science and Technology
OSTI ID:972706
The SEMATECH Berkeley Actinic Inspection Tool (AIT) is a prototype EUV-wavelength zoneplate microscope that provides high quality aerial image measurements of EUV reticles. To simplify and improve the alignment procedure we have created and tested arrays of aberration-sensitive patterns on EUV reticles and we have compared their images collected with the AIT to the expected shapes obtained by simulating the theoretical wavefront of the system. We obtained a consistent measure of coma and astigmatism in the center of the field of view using two different patterns, revealing a misalignment condition in the optics.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 972706
- Report Number(s):
- LBNL-2464E; TRN: US201005%%334
- Journal Information:
- Journal of Vacuum Science and Technology, Journal Name: Journal of Vacuum Science and Technology
- Country of Publication:
- United States
- Language:
- English
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