skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: 5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range

Abstract

We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 105-106 in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists ofa 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabrication process provided precise control of the grating periodicity, and the grating groove profile, together with very short anti-blazed facets, and near atomically smooth surface blazed facets. The blazed grating coated with 20 Mo/Si bilayers demonstrated a diffraction efficiency in the third order as high as 33percent at an incidence angle of 11? and wavelength of 14.18 nm.

Authors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Advanced Light Source Division
OSTI Identifier:
971087
Report Number(s):
LBNL-2275E
TRN: US201003%%564
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: Advances in X-Ray/EUV Optics and Components IV - part of program track on X-Ray, Gamma-Ray, and Particle Technologies. Optical Engineering + Applications - part of SPIE Optics + Photonics 2009, San Diego, CA
Country of Publication:
United States
Language:
English
Subject:
47; DEPOSITION; DIFFRACTION; DIFFRACTION GRATINGS; EFFICIENCY; ENERGY RANGE; FABRICATION; INCIDENCE ANGLE; MONOCRYSTALS; OPTICS; PERIODICITY; PHOTONS; RESOLUTION; SILICON; SUBSTRATES; WAVELENGTHS; blazed grating, multilayer, EUV, soft x-rays, scanning interference lithography, anisotropic etch, microfabrication

Citation Formats

Source, Advanced Light, Voronov, Dmitriy L, Anderson, Erik, Cambie, Rossana, Salmassi, Farhad, Gullikson, Eric, Yashchuk, Valeriy, Padmore, Howard, Ahn, Minseung, Chang, Chih-Hao, Heilmann, Ralf, and Schattenburg, Mark. 5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range. United States: N. p., 2009. Web.
Source, Advanced Light, Voronov, Dmitriy L, Anderson, Erik, Cambie, Rossana, Salmassi, Farhad, Gullikson, Eric, Yashchuk, Valeriy, Padmore, Howard, Ahn, Minseung, Chang, Chih-Hao, Heilmann, Ralf, & Schattenburg, Mark. 5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range. United States.
Source, Advanced Light, Voronov, Dmitriy L, Anderson, Erik, Cambie, Rossana, Salmassi, Farhad, Gullikson, Eric, Yashchuk, Valeriy, Padmore, Howard, Ahn, Minseung, Chang, Chih-Hao, Heilmann, Ralf, and Schattenburg, Mark. 2009. "5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range". United States. https://www.osti.gov/servlets/purl/971087.
@article{osti_971087,
title = {5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range},
author = {Source, Advanced Light and Voronov, Dmitriy L and Anderson, Erik and Cambie, Rossana and Salmassi, Farhad and Gullikson, Eric and Yashchuk, Valeriy and Padmore, Howard and Ahn, Minseung and Chang, Chih-Hao and Heilmann, Ralf and Schattenburg, Mark},
abstractNote = {We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 105-106 in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists ofa 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabrication process provided precise control of the grating periodicity, and the grating groove profile, together with very short anti-blazed facets, and near atomically smooth surface blazed facets. The blazed grating coated with 20 Mo/Si bilayers demonstrated a diffraction efficiency in the third order as high as 33percent at an incidence angle of 11? and wavelength of 14.18 nm.},
doi = {},
url = {https://www.osti.gov/biblio/971087}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 07 00:00:00 EDT 2009},
month = {Tue Jul 07 00:00:00 EDT 2009}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: