Metrology Challenges for High Energy Density Science Target Manufacture
Currently, High Energy Density Science (HEDS) experiments are used to support and qualify predictive physics models. These models assume ideal conditions such as energy (input) and device (target) geometry. The experiments rely on precision targets constructed from components with dimensions in the millimeter range, while having micrometer-scale, functional features, including planar steps, sine waves, and step-joint geometry on hemispherical targets. Future target designs will likely have features and forms that rival or surpass current manufacturing and characterization capability. The dimensional metrology of these features is important for a number of reasons, including qualification of sub-components prior to assembly, quantification of critical features on the as-built assemblies and as a feedback mechanism for fabrication process development. Variations in geometry from part to part can lead to functional limitations, such as unpredictable instabilities during an experiment and the inability to assemble a target from poorly matched sub-components. Adding to the complexity are the large number and variety of materials, components, and shapes that render any single metrology technique difficult to use with low uncertainty. Common materials include metal and glass foams, doped transparent and opaque plastics and a variety of deposited and wrought metals. A suite of metrology tools and techniques developed to address the many critical issues relevant to the manufacture of HEDS targets including interferometry, x-ray radiography and contact metrology are presented including two sided interferometry for absolute thickness metrology and low force probe technology for micrometer feature coordinate metrology.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 957177
- Report Number(s):
- LLNL-PROC-410774; TRN: US201007%%597
- Resource Relation:
- Conference: Presented at: The European Society for Precision Engineering and Nanotechnology (euspen) 9th International Conference, San Sebastian, Spain, Jun 02 - Jun 05, 2009
- Country of Publication:
- United States
- Language:
- English
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