High sensitivity resonance frequency measurements of individualmicro-cantilevers using fiber optical interferometry
We describe a setup for the resonance frequency measurement of individual microcantilevers. The setup displays both high spatial selectivity and sensitivity to specimen vibrations by utilizing a tapered uncoated fiber tip. The high sensitivity to specimen vibrations is achieved by the combination of optical Fabry-Perot interferometry and narrow band RF detection. Wave fronts reflected on the specimen and on the fiber tip end face interfere, thus no reference plane on the specimen is needed, as demonstrated with the example of freestanding silicon nitride micro-cantilevers. The resulting system is integrated in a DB-235 dual beam FIB system, thereby allowing the measurement of micro-cantilever responses during observation in SEM mode. The FIB was used to modify the optical fiber tip. At this point of our RF system development, the microcantilevers used to characterize the detector were not modified in situ.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 949775
- Report Number(s):
- LBNL-780E-Rev; RSINAK; TRN: US200908%%100
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments; ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Versatile fiber-coupled system for simultaneous photon correlation spectroscopy and Fabry-Perot interferometry
Digital phase demodulation for low-coherence interferometry-based fiber-optic sensors