Microfabricated diffusion source
Patent
·
OSTI ID:941682
- Albuquerque, NM
- Cedar Crest, NM
A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 7,399,449
- Application Number:
- AC04-94AL85000
- OSTI ID:
- 941682
- Country of Publication:
- United States
- Language:
- English
The preparation of standard gas mixtures. A review
|
journal | January 1981 |
Crystal orientation and electrolyte dependence for macropore nucleation and stable growth on p-type Si
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journal | January 2000 |
Formation of High Aspect Ratio Macropore Array on p-Type Silicon
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journal | January 1999 |
Generation of standard gaseous mixtures
|
journal | January 1984 |
Application of Diffusion Cells to Production of Known Concentration of Gaseous Hydrocarbons
|
journal | June 1960 |
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