Sputter deposition of ZnS:Mn/SrS:Ce multilayer stacks for use as white phosphor thin film electroluminscent panels

Conference · Sat Jul 01 00:00:00 EDT 1995

OSTI ID:93482

Ruffner, J A ^[1]; Tuenge, R T; Sun, Sey-Shing ^[2]

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1. Sandia National Labs., Albuquerque, NM (United States)
2. Planar America, Inc. Beaverton, Oregon (United States)

Sputter deposition of ZnS:Mn/SrS:Ce multilayered broad-band ``white`` emission thin film electroluminescent (TFEL) stacks has been investigated. To date, deposition of these multilayers has been limited to vacuum evaporation techniques and atomic layer epitaxy, both of which require two different substrate temperatures for growth of high quality ZnS and SrS. This repeated thermal cycling during multilayer deposition can induce stress, defects, and interdiffusion with adversely affect EL performance. Sputter deposition of ZnS and SrS produces high quality TFELs for a wider range of substrate temperatures. Both materials can be sputter deposited at a common temperature (300-350{degrees}C) which eliminates the need for thermal cycling and increases manufacturability. Luminance outputs from sputter deposited ZnS and SrS thin films are comparable to those from evaporated films, making sputtering an attractive alternative deposition technique for these materials. We report on the effects of sputter deposition parameters including chamber pressure, substrate temperature, and H2S process gas partial pressure on the resultant composition and morphology of ZnS:Mn and SrS:Ce thin films and multilayers. Their EL performance was evaluated and correlated to composition and morphology.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 93482
• Report Number(s): SAND-95-1496C; CONF-951033-4; ON: DE95015080
• Resource Relation: Conference: 27. international technical conference of the Society for the Advancement of Material and Process Engineering (SAMPE): diversity into the next century, Albuquerque, NM (United States), 9-12 Oct 1995; Other Information: PBD: [1995]
• Country of Publication: United States
• Language: English

Related Subjects

99 MATHEMATICS
COMPUTERS
INFORMATION SCIENCE
MANAGEMENT
LAW
MISCELLANEOUS
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
36 MATERIALS SCIENCE
DISPLAY DEVICES
ZINC SULFIDES
STRONTIUM SULFIDES
PHOSPHORS
THIN FILMS
ELECTROLUMINESCENCE
MANGANESE ADDITIONS
CERIUM ADDITIONS
SPUTTERING
DEPOSITION
PERFORMANCE