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Title: ECR plasma cleaning: an in-situ processing technique for RF cavities

Journal Article ·
OSTI ID:928093

A condition for Electron Cyclotron Resonance (ECR) can be established inside a fully assembled RF cavity without the need for removing high-power couplers. As such, plasma generated by this process can be used as a final cleaning step, or as an alternative cleaning step in place of other techniques. Tests showed filtered dry air plasma can successfully remove sulfur particles on niobium surface while the surface oxygen content remains intact.

Research Organization:
Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-07CH11359
OSTI ID:
928093
Report Number(s):
FERMILAB-PUB-08-005-TD; TRN: US0804582
Country of Publication:
United States
Language:
English