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Title: Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems

Abstract

The azimuthal Zernike coefficients for shells of Zernike functions with shell numbers n<N may be determined by making measurements at N equally spaced rotational positions. However, these measurements do not determine the coefficients of any of the purely radial Zernike functions. Label the circle that the azimuthal Zernikes are measured in as circle A. Suppose that the azimuthal Zernike coefficients for n<N are also measured in a smaller circle B which is inside circle A but offset so that it is tangent to circle A and so that it has the center of circle A just inside its circular boundary. The diameter of circle B is thus only slightly larger than half the diameter of circle A. From these two sets of measurements, all the Zernike coefficients may be determined for n<N. However, there are usually unknown small rigid body motions of the optic between measurements. Then all the Zernike coefficients for n<N except for piston, tilts, and focus may be determined. We describe the exact mathematical algorithm that does this and describe an interferometer which measures the complete wavefront from pinholes in pinhole aligners. These pinhole aligners are self-contained units which include a fiber optic, focusing optics, and amore » 'pinhole mirror'. These pinhole aligners can then be used in another interferometer so that its errors would then be known. Physically, the measurements in circles A and B are accomplished by rotating each pinhole aligner about an aligned axis, then about an oblique axis. Absolute measurement accuracies better than 0.2 nm were achieved.« less

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
920132
Report Number(s):
UCRL-CONF-213323
Journal ID: ISSN 0277-786X; TRN: US200818%%1066
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Journal Volume: 5869; Conference: Presented at: SPIE Annual Meeting, San Diego, CA, United States, Jul 31 - Aug 04, 2005
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUMM MECHANICS, GENERAL PHYSICS; 99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE; ALGORITHMS; CALIBRATION; FIBER OPTICS; FOCUSING; INTERFEROMETERS; INTERFEROMETRY; OPTICS

Citation Formats

Phillion, D W, Sommargren, G E, Johnson, M A, Decker, T A, Taylor, J S, Gomie, Y, Kakuchi, O, and Takeuchi, S. Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems. United States: N. p., 2005. Web. doi:10.1117/12.623187.
Phillion, D W, Sommargren, G E, Johnson, M A, Decker, T A, Taylor, J S, Gomie, Y, Kakuchi, O, & Takeuchi, S. Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems. United States. https://doi.org/10.1117/12.623187
Phillion, D W, Sommargren, G E, Johnson, M A, Decker, T A, Taylor, J S, Gomie, Y, Kakuchi, O, and Takeuchi, S. 2005. "Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems". United States. https://doi.org/10.1117/12.623187. https://www.osti.gov/servlets/purl/920132.
@article{osti_920132,
title = {Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems},
author = {Phillion, D W and Sommargren, G E and Johnson, M A and Decker, T A and Taylor, J S and Gomie, Y and Kakuchi, O and Takeuchi, S},
abstractNote = {The azimuthal Zernike coefficients for shells of Zernike functions with shell numbers n<N may be determined by making measurements at N equally spaced rotational positions. However, these measurements do not determine the coefficients of any of the purely radial Zernike functions. Label the circle that the azimuthal Zernikes are measured in as circle A. Suppose that the azimuthal Zernike coefficients for n<N are also measured in a smaller circle B which is inside circle A but offset so that it is tangent to circle A and so that it has the center of circle A just inside its circular boundary. The diameter of circle B is thus only slightly larger than half the diameter of circle A. From these two sets of measurements, all the Zernike coefficients may be determined for n<N. However, there are usually unknown small rigid body motions of the optic between measurements. Then all the Zernike coefficients for n<N except for piston, tilts, and focus may be determined. We describe the exact mathematical algorithm that does this and describe an interferometer which measures the complete wavefront from pinholes in pinhole aligners. These pinhole aligners are self-contained units which include a fiber optic, focusing optics, and a 'pinhole mirror'. These pinhole aligners can then be used in another interferometer so that its errors would then be known. Physically, the measurements in circles A and B are accomplished by rotating each pinhole aligner about an aligned axis, then about an oblique axis. Absolute measurement accuracies better than 0.2 nm were achieved.},
doi = {10.1117/12.623187},
url = {https://www.osti.gov/biblio/920132}, journal = {},
issn = {0277-786X},
number = ,
volume = 5869,
place = {United States},
year = {Wed Jun 29 00:00:00 EDT 2005},
month = {Wed Jun 29 00:00:00 EDT 2005}
}

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