Heterodyne interferometer with angstrom-level periodic nonlinearity

Schmitz, Tony L; Beckwith, John F

Title: Heterodyne interferometer with angstrom-level periodic nonlinearity

Abstract

Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.

Inventors:

Schmitz, Tony L ^[1]; Beckwith, John F ^[2]

Gainesville, FL
Indialantic, FL

Publication Date:: Tue Jan 25 00:00:00 EST 2005

Sponsoring Org.:: USDOE

OSTI Identifier:: 920035

Patent Number(s):: 6,847,455

Application Number:: 10/254,567

Assignee:: The United States of America as represented by the Department of Energy (Washington, DC)

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Schmitz, Tony L, and Beckwith, John F. Heterodyne interferometer with angstrom-level periodic nonlinearity.  United States: N. p., 2005. 
        Web.

Copy to clipboard


                    Schmitz, Tony L, & Beckwith, John F. Heterodyne interferometer with angstrom-level periodic nonlinearity.  United States.

Copy to clipboard


                    Schmitz, Tony L, and Beckwith, John F. 2005.  
        "Heterodyne interferometer with angstrom-level periodic nonlinearity".  United States.  https://www.osti.gov/servlets/purl/920035.

Copy to clipboard


                    
@article{osti_920035,

  title        = {Heterodyne interferometer with angstrom-level periodic nonlinearity},

  author       = {Schmitz, Tony L and Beckwith, John F},

  abstractNote = {Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/920035},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jan 25 00:00:00 EST 2005},

  month        = {Tue Jan 25 00:00:00 EST 2005}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Non-linearity in length measurement using heterodyne laser Michelson interferometry
journal, October 1987

Sutton, C. M.
Journal of Physics E: Scientific Instruments, Vol. 20, Issue 10
https://doi.org/10.1088/0022-3735/20/10/034

A simple technique for observing periodic nonlinearities in Michelson interferometers
journal, October 1998

Stone, Jack A.; Howard, Lowell P.
Precision Engineering, Vol. 22, Issue 4
https://doi.org/10.1016/S0141-6359(98)00016-6

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
journal, January 2000

Badami, V. G.; Patterson, S. R.
Precision Engineering, Vol. 24, Issue 1
https://doi.org/10.1016/S0141-6359(99)00026-4

Optical sources of non-linearity in heterodyne interferometers
journal, January 1990

Rosenbluth, A. E.; Bobroff, N.
Precision Engineering, Vol. 12, Issue 1
https://doi.org/10.1016/0141-6359(90)90003-H

Recent advances in displacement measuring interferometry
journal, September 1993

Bobroff, N.
Measurement Science and Technology, Vol. 4, Issue 9
https://doi.org/10.1088/0957-0233/4/9/001

Sub-micron position measurement and control on precision machine tools with laser interferometry
journal, January 1990

Steinmetz, C. R.
Precision Engineering, Vol. 12, Issue 1
https://doi.org/10.1016/0141-6359(90)90004-I

Analysis of the measurement error of the parameters of mechanical vibrations
journal, July 1980

Fedotova, G. V.
Measurement Techniques, Vol. 23, Issue 7
https://doi.org/10.1007/BF00825465

Heterodyne interferometer to measure vibration parameters
journal, January 1984

Barash, V. Ya.; Fedotova, G. V.
Measurement Techniques, Vol. 27, Issue 1
https://doi.org/10.1007/BF01100606

Residual errors in laser interferometry from air turbulence and nonlinearity
journal, January 1987

Bobroff, Norman
Applied Optics, Vol. 26, Issue 13
https://doi.org/10.1364/AO.26.002676

Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement
conference, June 1988

Tanaka,
Conference on Precision Electromagnetic Measurements
https://doi.org/10.1109/CPEM.1988.671216

Analytical modeling of the periodic nonlinearity in heterodyne interferometry
journal, January 1998

Wu, Chien-Ming; Deslattes, Richard D.
Applied Optics, Vol. 37, Issue 28
https://doi.org/10.1364/AO.37.006696

Probing of Acoustic Surface Perturbations by Coherent Light
journal, January 1969

Whitman, R. L.; Korpel, A.
Applied Optics, Vol. 8, Issue 8
https://doi.org/10.1364/AO.8.001567

Heterodyne interferometer with subatomic periodic nonlinearity
journal, January 1999

Wu, Chien-ming; Lawall, John; Deslattes, Richard D.
Applied Optics, Vol. 38, Issue 19
https://doi.org/10.1364/AO.38.004089

Similar records in OSTI.GOV collections:

Heterodyne Interferometer with Angstrom-level Periodic Nonlinearity

Patent Application Schmitz, Tony; Beckwith, John

Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acoustooptic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beammore »« less
Full Text Available
Methods for increasing the accuracy of remote measurements with twin-wave laser interferometers

Journal Article Mishchenko, Y - Meas. Tech. (Engl. Transl.); (United States)

One of the most common interference schemes used for remote measurements is the optical system of the Michelson laser interferometer (LI). A modification of this is shown in the paper. Interference modulation is accomplished by periodic movement of light-splitting plate in the direction of propagation of the light beam and periodic movement is provided by a piezoceramic motion converter, which is firmly attached to the plate. As a result of periodic movements to the plate, the photoconverter produces an ac signal whose phase is related to the movement of the interference pattern. Thus, the entire subsequent measurement process involves measuringmore »« less
CO/sub 2/ laser interferometer array for Big Dee

Journal Article Fairbanks, E - Rev. Sci. Instrum.; (United States)

A 12 channel interferometer array is planned for obtaining electron density profiles on Big Dee. Each channel consists of coaxial CO/sub 2/ and HeNe laser beams. The reference beam is formed by splitting off half of the laser power at each wavelength by using acousto-optic modulators which introduce a 40-MHz frequency shift in the reference beam. The detected interference signals from room-temperature visible and IR detectors are mixed with the 40-MHz drive for the acousto-optic cells. The quadrature mixer signals result in phase information due to vibration and phase-velocity variation in the plasma. Simultaneous solution of the two equations describingmore »« less
https://doi.org/10.1063/1.1138037
CO/sub 2/ laser interferometer array for Big Dee

Conference Fairbanks, E

A twelve channel interferometer array is planned for obtaining electron density profiles on Big Dee. Each channel consists of coaxial CO/sub 2/ and HeNe laser beams. The reference beam is formed by splitting off half of the laser power at each wavelength by using acousto-optic modulators which introduce a 40 MHz frequency shift in the reference beam. The detected interference signals from room temperature visible and IR detectors are mixed with the 40 MHz drive for the acousto-optic cells. The quadrature mixer signals result in phase information due to vibration and phase velocity variation in the plasma. Simultaneous solution ofmore »« less
Phase-modulated polarizing interferometer

Patent Bareket, N; Metheny, W

An interferometer for measuring optical surfaces which is capable of very high sensitivity. A HeNe laser light is converted into a circular polarized beam, spatially filtered and collimated. The light beam is passed through a photoelastic modulator for modulating the relative phase of the two polarization states of the optical field of the beam. The beam is then passed through a ROCHON prism which splits the beam into two orthogonally polarized components. One beam is reflected off the optical surface that is being measured and is recombined with the undeviated beam. The resulting irradiance distribution oscillates in the modulation frequencymore »« less

Similar Records

Title: Heterodyne interferometer with angstrom-level periodic nonlinearity

Abstract

Citation Formats

Non-linearity in length measurement using heterodyne laser Michelson interferometry journal, October 1987

A simple technique for observing periodic nonlinearities in Michelson interferometers journal, October 1998

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry journal, January 2000

Optical sources of non-linearity in heterodyne interferometers journal, January 1990

Recent advances in displacement measuring interferometry journal, September 1993

Sub-micron position measurement and control on precision machine tools with laser interferometry journal, January 1990

Analysis of the measurement error of the parameters of mechanical vibrations journal, July 1980

Heterodyne interferometer to measure vibration parameters journal, January 1984

Residual errors in laser interferometry from air turbulence and nonlinearity journal, January 1987

Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement conference, June 1988

Analytical modeling of the periodic nonlinearity in heterodyne interferometry journal, January 1998

Probing of Acoustic Surface Perturbations by Coherent Light journal, January 1969

Heterodyne interferometer with subatomic periodic nonlinearity journal, January 1999

Non-linearity in length measurement using heterodyne laser Michelson interferometry
journal, October 1987

A simple technique for observing periodic nonlinearities in Michelson interferometers
journal, October 1998

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
journal, January 2000

Optical sources of non-linearity in heterodyne interferometers
journal, January 1990

Recent advances in displacement measuring interferometry
journal, September 1993

Sub-micron position measurement and control on precision machine tools with laser interferometry
journal, January 1990

Analysis of the measurement error of the parameters of mechanical vibrations
journal, July 1980

Heterodyne interferometer to measure vibration parameters
journal, January 1984

Residual errors in laser interferometry from air turbulence and nonlinearity
journal, January 1987

Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement
conference, June 1988

Analytical modeling of the periodic nonlinearity in heterodyne interferometry
journal, January 1998

Probing of Acoustic Surface Perturbations by Coherent Light
journal, January 1969

Heterodyne interferometer with subatomic periodic nonlinearity
journal, January 1999