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Title: Side extraction duoPIGatron-type ion source.

Abstract

We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in such the ion can be extracted from side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has stable arc, uniformly bright illumination, and dense plasma. The present work describes some of preliminary operating parameters of the ion source using Argon, BF3. The total unanalyzed beam currents are 23 mA using Ar at an arc current 5 A and 13 mA using BF3 gas at an arc current 6 A.

Authors:
; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
Doe - Office Of Science
OSTI Identifier:
918608
Report Number(s):
BNL-79412-2007-CP
R&D Project: 18033; KB0202011; TRN: US0805936
DOE Contract Number:  
DE-AC02-98CH10886
Resource Type:
Conference
Resource Relation:
Conference: 12TH INTERNATIONAL CONFERENCE ON ION SOURCES (ICIS 2007); JEJU, KOREA; 20070826 through 20070831
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM EXTRACTION; APERTURES; BEAM CURRENTS; ION SOURCES; DESIGN

Citation Formats

GUSHENETS, V I, OKS, E M, HERSCHOVITCH, A, and JOHNSON, B M. Side extraction duoPIGatron-type ion source.. United States: N. p., 2007. Web.
GUSHENETS, V I, OKS, E M, HERSCHOVITCH, A, & JOHNSON, B M. Side extraction duoPIGatron-type ion source.. United States.
GUSHENETS, V I, OKS, E M, HERSCHOVITCH, A, and JOHNSON, B M. 2007. "Side extraction duoPIGatron-type ion source.". United States. https://www.osti.gov/servlets/purl/918608.
@article{osti_918608,
title = {Side extraction duoPIGatron-type ion source.},
author = {GUSHENETS, V I and OKS, E M and HERSCHOVITCH, A and JOHNSON, B M},
abstractNote = {We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in such the ion can be extracted from side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has stable arc, uniformly bright illumination, and dense plasma. The present work describes some of preliminary operating parameters of the ion source using Argon, BF3. The total unanalyzed beam currents are 23 mA using Ar at an arc current 5 A and 13 mA using BF3 gas at an arc current 6 A.},
doi = {},
url = {https://www.osti.gov/biblio/918608}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Aug 26 00:00:00 EDT 2007},
month = {Sun Aug 26 00:00:00 EDT 2007}
}

Conference:
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