MEMS inertial sensors with integral rotation means.
Abstract
The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertial micro-sensors.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 917477
- Report Number(s):
- SAND2003-3388
TRN: US200817%%696
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Technical Report
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; ACCELEROMETERS; GYROSCOPES; MITIGATION; ROTATION; STABILITY; Miniature electronic equipment-Design and construction.; Microsensors.; Gyroscopes.; Inertia; Accelerometers.
Citation Formats
Kohler, Stewart M. MEMS inertial sensors with integral rotation means.. United States: N. p., 2003.
Web. doi:10.2172/917477.
Kohler, Stewart M. MEMS inertial sensors with integral rotation means.. United States. https://doi.org/10.2172/917477
Kohler, Stewart M. 2003.
"MEMS inertial sensors with integral rotation means.". United States. https://doi.org/10.2172/917477. https://www.osti.gov/servlets/purl/917477.
@article{osti_917477,
title = {MEMS inertial sensors with integral rotation means.},
author = {Kohler, Stewart M},
abstractNote = {The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertial micro-sensors.},
doi = {10.2172/917477},
url = {https://www.osti.gov/biblio/917477},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Sep 01 00:00:00 EDT 2003},
month = {Mon Sep 01 00:00:00 EDT 2003}
}