Demand Controlled Filtration in an Industrial Cleanroom

Technical Report · Sat Sep 01 00:00:00 EDT 2007

DOI:https://doi.org/10.2172/917412· OSTI ID:917412

Faulkner, David; DiBartolomeo, Dennis; Wang, Duo

In an industrial cleanroom, significant energy savings were realized by implementing two types of demand controlled filtration (DCF) strategies, one based on particle counts and one on occupancy. With each strategy the speed of the recirculation fan filter units was reduced to save energy. When the control was based on particle counts, the energy use was 60% of the baseline configuration of continuous fan operation. With simple occupancy sensors, the energy usage was 63% of the baseline configuration. During the testing of DCF, no complaints were registered by the operator of the cleanroom concerning processes and products being affected by the DCF implementation.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Director, Office of Science
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 917412
• Report Number(s): LBNL-63420; R&D Project: E12016; TRN: US200816%%569
• Country of Publication: United States
• Language: English

Related Subjects

32
BLOWERS
CONFIGURATION
FILTRATION
IMPLEMENTATION
TESTING
VELOCITY