skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Condenser optic with sacrificial reflective surface

Patent ·
OSTI ID:913247
 [1];  [2];  [3]
  1. Castro Valley, CA
  2. Livermore, CA
  3. Sunnyvale, CA
+ Show Author Affiliations

Employing collector optics that has a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics is normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.

Research Organization:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
EUV LLC (Santa Clara, CA)
Patent Number(s):
7,239,443
Application Number:
11/479,340
OSTI ID:
913247
Country of Publication:
United States
Language:
English

References (4)

Use of molecular oxygen to reduce EUV-induced carbon contamination of optics
  • Malinowski, Michael E.; Grunow, Philip A.; Steinhaus, Chip
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.436677
conference August 2001
Care and conditioning of optical surfaces for SRS beamlines conference January 1988
Improved theoretical reflectivities of extreme ultraviolet mirrors conference July 2000
Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity journal January 2000

Similar Records

Related Subjects

47 OTHER INSTRUMENTATION