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Title: Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides

Abstract

The authors present prism coupling measurements on Al{sub x}Ga{sub 1{minus}x}As native oxides showing the dependence of refractive index on composition (0.3 {le} x {le} 0.97), oxidation temperature (400 {le} T {le} 500), and carrier gas purity. Index values range from n = 1.490 (x = 0.9, 400) to 1.707 (x = 0.3, 500 C). The oxides are shown to adsorb moisture, increasing their index by up to 0.10 (7%). Native oxides of Al{sub x}Ga{sub 1{minus}x}As (x {le} 0.5) have index values up to 0.27 higher and are less hygroscopic when prepared with a small amount of O{sub 2} in the N{sub 2} + H{sub 2}O process gas. The higher index values are attributed to a greater degree of oxidation of the Ga in the film.

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
9018
Report Number(s):
SAND99-1752J
TRN: AH200122%%135
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Other Information: Submitted to Applied Physics Letters; PBD: 8 Jul 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM ARSENIDES; GALLIUM ARSENIDES; MOISTURE; OXIDATION; REFRACTIVE INDEX; STABILITY; WETTABILITY; ALUMINIUM OXIDES; GALLIUM OXIDES; ARSENIC OXIDES

Citation Formats

Blum, O, Epstein, R J, HOu, H, Hall, D C, Kou, L, Luo, Y, and Wu, H. Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides. United States: N. p., 1999. Web. doi:10.1063/1.123571.
Blum, O, Epstein, R J, HOu, H, Hall, D C, Kou, L, Luo, Y, & Wu, H. Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides. United States. https://doi.org/10.1063/1.123571
Blum, O, Epstein, R J, HOu, H, Hall, D C, Kou, L, Luo, Y, and Wu, H. 1999. "Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides". United States. https://doi.org/10.1063/1.123571. https://www.osti.gov/servlets/purl/9018.
@article{osti_9018,
title = {Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides},
author = {Blum, O and Epstein, R J and HOu, H and Hall, D C and Kou, L and Luo, Y and Wu, H},
abstractNote = {The authors present prism coupling measurements on Al{sub x}Ga{sub 1{minus}x}As native oxides showing the dependence of refractive index on composition (0.3 {le} x {le} 0.97), oxidation temperature (400 {le} T {le} 500), and carrier gas purity. Index values range from n = 1.490 (x = 0.9, 400) to 1.707 (x = 0.3, 500 C). The oxides are shown to adsorb moisture, increasing their index by up to 0.10 (7%). Native oxides of Al{sub x}Ga{sub 1{minus}x}As (x {le} 0.5) have index values up to 0.27 higher and are less hygroscopic when prepared with a small amount of O{sub 2} in the N{sub 2} + H{sub 2}O process gas. The higher index values are attributed to a greater degree of oxidation of the Ga in the film.},
doi = {10.1063/1.123571},
url = {https://www.osti.gov/biblio/9018}, journal = {Applied Physics Letters},
number = ,
volume = ,
place = {United States},
year = {Thu Jul 08 00:00:00 EDT 1999},
month = {Thu Jul 08 00:00:00 EDT 1999}
}