Ruthenium / aerogel nanocomposits via Atomic Layer Deposition
Journal Article
·
· Nanotechnology, vol. 5, no. 18, February 7, 2007, pp. 055303
OSTI ID:900109
We present a general approach to prepare metal/aerogel nanocomposites via template directed atomic layer deposition (ALD). In particular, we used a Ru ALD process consisting of alternating exposures to bis(cyclopentadienyl)ruthenium (RuCp{sub 2}) and air at 350 C to deposit metallic Ru nanoparticles on the internal surfaces of carbon and silica aerogels. The process does not affect the morphology of the aerogel template and offers excellent control over metal loading by simply adjusting the number of ALD cycles. We also discuss the limitations of our ALD approach, and suggest ways to overcome these.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 900109
- Report Number(s):
- UCRL-JRNL-226605; TRN: US200709%%393
- Journal Information:
- Nanotechnology, vol. 5, no. 18, February 7, 2007, pp. 055303, Journal Name: Nanotechnology, vol. 5, no. 18, February 7, 2007, pp. 055303
- Country of Publication:
- United States
- Language:
- English
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