MM-Wave Cavity/Klystron Developments Using Deep X-Ray Lithography at the Advanced Photon Source
Recent microfabrication technologies based on LIGA (German acronym for Lithographe, Galvanoformung, und Abformung) have been applied to build high-aspect-ratio, metallic or dielectric, planar structures suitable for high-frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacturing of precision x-ray masks, exposure of positive resist by x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated using the synchrotron radiation sources at APS. Preliminary design parameters for a 91-GHz modulator klystron along with an overview of the new technology are discussed.
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 894157
- Report Number(s):
- SLAC-PUB-12177; TRN: US200702%%102
- Journal Information:
- eConf C9803233:298,1998, Conference: 1st Asian Particle Accelerator Conference (APAC 98) 23-27 Mar 1998, Tsukuba, Japan
- Country of Publication:
- United States
- Language:
- English
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MM-wave cavity/klystron developments using deep x-ray lithography at the Advanced Photon Source.
Deep x-ray lithography fabrication of mm Wave cavities at the Advanced Photon Source.