Modeling and Imaging Flexural Plate Wave Devices
Sandia National Laboratories is developing a new form of flexural plate wave device (FPW) for sensor applications. In this device, Lorentz forces cause out of plane vibrations in a silicon nitride membrane. Current induced in transducer lines on the membrane provides information about the amplitude and phase of these surface vibrations. By tracking the large amplitude vibrations that occur at resonant frequencies, it is possible to infer information about loading on the membrane. In fabricating FPWs, it is important to understand the impact that minor defects can have on operation. Through modeling and testing, they are developing resilient designs that provide large amplitude signals with a high tolerance to defects. A finite element model has been developed to perform design trade-off studies, and results from the model are being verified with a unique measurement system that can image Angstrom scale displacements at vibrational frequencies up to 800 kHz. Results from FPW modeling and imaging efforts are presented in this paper.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 8865
- Report Number(s):
- SAND99-1012C; TRN: AH200117%%180
- Resource Relation:
- Conference: ASME 1999 International Mechanical Engineering Congress and Exposition, Nashville, TN (US), 11/14/1999--11/19/1999; Other Information: PBD: 9 Jul 1999
- Country of Publication:
- United States
- Language:
- English
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