Design and Analysis of a Micro-Optical Position Readout for Acceleration Sensing
Sandia National Laboratories is developing a MEMS-based trajectory safety subsystem, which allows enablement of critical functions only after a particular acceleration environment has been achieved. The device, known as an Environmental Sensing Device (ESD), consists of a suspended moving shuttle that translates a given distance when exposed to an appropriate acceleration environment. The shuttle contains an embedded code, consisting of grating structures, that is illuminated and optically read using a semiconductor laser and detector integrated together in a GaAs-based Photonic Integrated Circuit (PIC) flip-chip bonded to the assembly. This paper will describe the optical design and performance analysis of the embedded code features in the shuttle.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 8862
- Report Number(s):
- SAND99-0501C; TRN: AH200117%%177
- Resource Relation:
- Conference: Miniaturize Systems with Micro-Optics and MEMS (Symposium on Micromachining and Microfabrication, SPIE), Santa Clara, CA (US), 09/20/1999--09/22/1999; Other Information: PBD: 8 Jul 1999
- Country of Publication:
- United States
- Language:
- English
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