Ion Implantation with Scanning Probe Alignment
Conference
·
OSTI ID:881844
We describe a scanning probe instrument which integrates ion beams with the imaging and alignment function of a piezo-resistive scanning probe in high vacuum. The beam passes through several apertures and is finally collimated by a hole in the cantilever of the scanning probe. The ion beam spot size is limited by the size of the last aperture. Highly charged ions are used to show hits of single ions in resist, and we discuss the issues for implantation of single ions.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE; Army Research Office. National SecurityAgency
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 881844
- Report Number(s):
- LBNL-58750; R&D Project: 43GW03; BnR: 400403909; TRN: US200612%%930
- Resource Relation:
- Conference: 49th International Conference on Electron, Ion,and Photon Beam Technology and Nanofrabrication (EIPBN2005), Orlando, FL,May 31-June 3, 2005
- Country of Publication:
- United States
- Language:
- English
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