Mitigation of radiation induced surface contamination

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:875111

Klebanoff, Leonard E ^[1]; Stulen, Richard H ^[2]

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1. Dublin, CA
2. Livermore, CA

A process for mitigating or eliminating contamination and/or degradation of surfaces having common, adventitious atmospheric contaminants adsorbed thereon and exposed to radiation. A gas or a mixture of gases is introduced into the environment of a surface(s) to be protected. The choice of the gaseous species to be introduced (typically a hydrocarbon gas, water vapor, or oxygen or mixtures thereof) is dependent upon the contaminant as well as the ability of the gaseous species to bind to the surface to be protected. When the surface and associated bound species are exposed to radiation reactive species are formed that react with surface contaminants such as carbon or oxide films to form volatile products (e.g., CO, CO.sub.2) which desorb from the surface.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: EUV LLC (Santa Clara, CA)
• Patent Number(s): US 6533952
• OSTI ID: 875111
• Country of Publication: United States
• Language: English

Related Subjects

mitigation
radiation
induced
surface
contamination
process
mitigating
eliminating
andor
degradation
surfaces
common
adventitious
atmospheric
contaminants
adsorbed
exposed
gas
mixture
gases
introduced
environment
protected
choice
gaseous
species
typically
hydrocarbon
water
vapor
oxygen
mixtures
dependent
contaminant
ability
bind
associated
bound
reactive
formed
react
carbon
oxide
films
form
volatile
products
cosub2
desorb
water vapor
reactive species
radiation induced
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