Monolithic integration of a MOSFET with a MEMS device
- Albuquerque, NM
- Albuquerque, MN
An integrated microelectromechanical system comprises at least one MOSFET interconnected to at least one MEMS device on a common substrate. A method for integrating the MOSFET with the MEMS device comprises fabricating the MOSFET and MEMS device monolithically on the common substrate. Conveniently, the gate insulator, gate electrode, and electrical contacts for the gate, source, and drain can be formed simultaneously with the MEMS device structure, thereby eliminating many process steps and materials. In particular, the gate electrode and electrical contacts of the MOSFET and the structural layers of the MEMS device can be doped polysilicon. Dopant diffusion from the electrical contacts is used to form the source and drain regions of the MOSFET. The thermal diffusion step for forming the source and drain of the MOSFET can comprise one or more of the thermal anneal steps to relieve stress in the structural layers of the MEMS device.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6531331
- OSTI ID:
- 875099
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
integration
mosfet
mems
device
integrated
microelectromechanical
interconnected
common
substrate
method
integrating
fabricating
monolithically
conveniently
gate
insulator
electrode
electrical
contacts
source
drain
formed
simultaneously
structure
eliminating
process
steps
materials
structural
layers
doped
polysilicon
dopant
diffusion
form
regions
thermal
step
forming
anneal
relieve
stress
electrical contact
mems device
common substrate
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