Ion beam collimating grid to reduce added defects

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:875062

Lindquist, Walter B ^[1]; Kearney, Patrick A ^[2]

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1. Oakland, CA
2. Livermore, CA

A collimating grid for an ion source located after the exit grid. The collimating grid collimates the ion beamlets and disallows beam spread and limits the beam divergence during transients and steady state operation. The additional exit or collimating grid prevents beam divergence during turn-on and turn-off and prevents ions from hitting the periphery of the target where there is re-deposited material or from missing the target and hitting the wall of the vessel where there is deposited material, thereby preventing defects from being deposited on a substrate to be coated. Thus, the addition of a collimating grid to an ion source ensures that the ion beam will hit and be confined to a specific target area.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): US 6521897
• OSTI ID: 875062
• Country of Publication: United States
• Language: English

Related Subjects

beam
collimating
grid
reduce
added
defects
source
located
exit
collimates
beamlets
disallows
spread
limits
divergence
transients
steady
operation
additional
prevents
turn-on
turn-off
hitting
periphery
target
re-deposited
material
missing
wall
vessel
deposited
preventing
substrate
coated
addition
ensures
hit
confined
specific
beam divergence
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