Fabrication of metallic microstructures by micromolding nanoparticles
Abstract
A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.
- Inventors:
-
- Livermore, CA
- Goleta, CA
- Danville, CA
- Henrietta, NY
- Fremont, CA
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874844
- Patent Number(s):
- US 6472459
- Assignee:
- Sandia Corporation (Livermore, CA)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- fabrication; metallic; microstructures; micromolding; nanoparticles; method; provided; fabricating; microcomponents; micron; submicron; dimensions; molding; composition; prepared; containing; optional; binder; nanometer; size; 1000; nm; diameter; particles; mold; lithographically; patterned; liga; negative; photoresist; filled; compressed; resulting; removed; sintered; /524/419/
Citation Formats
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States: N. p., 2002.
Web.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, & Skala, Dawn M. Fabrication of metallic microstructures by micromolding nanoparticles. United States.
Morales, Alfredo M, Winter, Michael R, Domeier, Linda A, Allan, Shawn M, and Skala, Dawn M. 2002.
"Fabrication of metallic microstructures by micromolding nanoparticles". United States. https://www.osti.gov/servlets/purl/874844.
@article{osti_874844,
title = {Fabrication of metallic microstructures by micromolding nanoparticles},
author = {Morales, Alfredo M and Winter, Michael R and Domeier, Linda A and Allan, Shawn M and Skala, Dawn M},
abstractNote = {A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.},
doi = {},
url = {https://www.osti.gov/biblio/874844},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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