Electrostatic apparatus for measurement of microfracture strength

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874616

de Boer, Maarten ^[1]; Bitsie, Fernando ^[1]; Jensen, Brian D ^[2]

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1. Albuquerque, NM
2. Ann Arbor, MI

A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6424165
• OSTI ID: 874616
• Country of Publication: United States
• Language: English

Related Subjects

electrostatic
apparatus
measurement
microfracture
strength
materials
testing
invented
suited
fracture
fatigue
properties
extremely
strong
encountered
microelectromechanical
systems
material
strains
excess
applied
pseudostatically
dynamically
repetitively
testers
practical
methods
determine
routinely
process
environment
alternatives
circumstances
particularly suited
fracture strength
testing apparatus
/324/73/310/