Illumination system having a plurality of movable sources

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874468

Sweatt, William C ^[1]; Kubiak, Glenn D ^[2]

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1. Albuquerque, NM
2. Livermore, CA

An illumination system includes several discharge sources that are multiplexed together to reduce the amount of debris generated. The system includes: (a) a first electromagnetic radiation source array that includes a plurality of first activatable radiation source elements that are positioned on a first movable carriage; (b) a second electromagnetic radiation source array that includes a plurality of second activatable radiation source elements that are positioned on a second movable carriage; (c) means for directing electromagnetic radiation from the first electromagnetic radiation source array and electromagnetic radiation from the second electromagnetic radiation source array toward a common optical path; (d) means for synchronizing (i) the movements of the first movable carriage and of the second movable carriage and (ii) the activation of the first electromagnetic radiation source array and of the second electromagnetic radiation source array to provide an essentially continuous illumination of electromagnetic radiation along the common optical path.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: EUV LLC (Livermore, CA)
• Patent Number(s): US 6396068
• OSTI ID: 874468
• Country of Publication: United States
• Language: English

Related Subjects

illumination
plurality
movable
sources
discharge
multiplexed
reduce
amount
debris
generated
electromagnetic
radiation
source
array
activatable
elements
positioned
carriage
means
directing
common
optical
path
synchronizing
movements
ii
activation
provide
essentially
continuous
electromagnetic radiation
radiation source
optical path
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