Gas-driven microturbine

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874309

Sniegowski, Jeffrey J ^[1]; Rodgers, Murray S ^[1]; McWhorter, Paul J ^[1]; Aeschliman, Daniel P ^[2]; Miller, William M ^[3]

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1. Albuquerque, NM
2. Cedar Crest, NM
3. Tijeras, NM

A microturbine fabricated by a three-level semiconductor batch-fabrication process based on polysilicon surface-micromachining. The microturbine comprises microelectromechanical elements formed from three polysilicon multi-layer surfaces applied to a silicon substrate. Interleaving sacrificial oxide layers provides electrical and physical isolation, and selective etching of both the sacrificial layers and the polysilicon layers allows formation of individual mechanical and electrical elements as well as the required space for necessary movement of rotating turbine parts and linear elements.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: The United States of America as represented by the United States Department (Washington, DC)
• Patent Number(s): US 6363712
• OSTI ID: 874309
• Country of Publication: United States
• Language: English

Related Subjects

gas-driven
microturbine
fabricated
three-level
semiconductor
batch-fabrication
process
based
polysilicon
surface-micromachining
microelectromechanical
elements
formed
multi-layer
surfaces
applied
silicon
substrate
interleaving
sacrificial
oxide
layers
provides
electrical
physical
isolation
selective
etching
allows
formation
individual
mechanical
required
space
movement
rotating
turbine
linear
oxide layer
silicon substrate
fabrication process
elements formed
silicon surface
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