Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874232

Morales, Alfredo M ^[1]

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1. Pleasanton, CA

A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Livermore, CA)
• Patent Number(s): US 6346030
• OSTI ID: 874232
• Country of Publication: United States
• Language: English

Related Subjects

microdevice
interior
cavity
aspect
ratio
surface
features
associated
methods
manufacture
ultrasmooth
surfaces
method
described
liga-produced
shaped
bit
contour
polish
sacrificial
mandrel
contoured
subsequently
coated
structural
material
removed
produce
microdevices
micrometer-sized
sub-micrometer
rms
roughness
smooth surface
associated method
interior cavity
surface feature
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