Surface-micromachined chain for use in microelectromechanical structures

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:874158

Vernon, Sr., George E. ^[1]

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1. (Rio Rancho, NM)

A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6328903
• OSTI ID: 874158
• Country of Publication: United States
• Language: English

Related Subjects

surface-micromachined
chain
microelectromechanical
structures
structure
incorporating
disclosed
fabricated
substrate
silicon
depositing
patterning
plurality
alternating
layers
chain-forming
material
polycrystalline
sacrificial
dioxide
silicate
glass
removed
etching
release
movement
applications
forming
types
devices
microengine
electrostatic
motor
connected
rotate
drive
sprocket
driven
sprockets
silicon substrate
various types
mechanical structure
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