Condenser for extreme-UV lithography with discharge source
Patent
·
OSTI ID:873974
- Albuquerque, NM
- Livermore, CA
Condenser system, for use with a ringfield camera in projection lithography, employs quasi grazing-incidence collector mirrors that are coated with a suitable reflective metal such as ruthenium to collect radiation from a discharge source to minimize the effect of contaminant accumulation on the collecting mirrors.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- US 6285737
- OSTI ID:
- 873974
- Country of Publication:
- United States
- Language:
- English
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High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography
|
conference | June 1999 |
High-power extreme-ultraviolet source based on gas jets
|
conference | June 1998 |
Intense plasma discharge source at 135 nm for extreme-ultraviolet lithography
|
journal | January 1997 |
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Related Subjects
condenser
extreme-uv
lithography
discharge
source
ringfield
camera
projection
employs
quasi
grazing-incidence
collector
mirrors
coated
suitable
reflective
metal
ruthenium
collect
radiation
minimize
effect
contaminant
accumulation
collecting
reflective metal
extreme-uv lithography
projection lithography
ringfield camera
collect radiation
discharge source
/378/359/
extreme-uv
lithography
discharge
source
ringfield
camera
projection
employs
quasi
grazing-incidence
collector
mirrors
coated
suitable
reflective
metal
ruthenium
collect
radiation
minimize
effect
contaminant
accumulation
collecting
reflective metal
extreme-uv lithography
projection lithography
ringfield camera
collect radiation
discharge source
/378/359/