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Title: Method for making surfactant-templated, high-porosity thin films

Patent ·
OSTI ID:873911

An evaporation-induced self-assembly method to prepare a surfactant-templated thin film by mixing a silica sol, a surfactant, and a hydrophobic polymer and then evaporating a portion of the solvent during coating onto a substrate and then heating to form a liquid-phase, thin film material with a porosity greater than approximately 50 percent. The high porosity thin films can have dielectric constants less than 2 to be suitable for applications requiring low-dielectric constants. An interstitial compound can be added to the mixture, with the interstitial compound either covalently bonded to the pores or physically entrapped within the porous structure. The selection of the interstitial compound provides a means for developing thin films for applications including membranes, sensors, low dielectric constant films, photonic materials and optical hosts.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6270846
OSTI ID:
873911
Country of Publication:
United States
Language:
English

References (5)

Synthesis of hybrid inorganic–organic mesoporous silica by co-condensation of siloxane and organosiloxane precursors journal January 1996
Synthesis and Characterization of a Reactive Vinyl-Functionalized MCM-41:  Probing the Internal Pore Structure by a Bromination Reaction journal April 1997
Synthesis and characterization of ordered organo–silica–surfactant mesophases with functionalized MCM-41-type architecture journal January 1997
Functionalized Monolayers on Ordered Mesoporous Supports journal May 1997
Continuous self-assembly of organic–inorganic nanocomposite coatings that mimic nacre journal July 1998