Fully depleted back illuminated CCD

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:873848

Holland, Stephen Edward ^[1]

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1. Hercules, CA

A backside illuminated charge coupled device (CCD) is formed of a relatively thick high resistivity photon sensitive silicon substrate, with frontside electronic circuitry, and an optically transparent backside ohmic contact for applying a backside voltage which is at least sufficient to substantially fully deplete the substrate. A greater bias voltage which overdepletes the substrate may also be applied. One way of applying the bias voltage to the substrate is by physically connecting the voltage source to the ohmic contact. An alternate way of applying the bias voltage to the substrate is to physically connect the voltage source to the frontside of the substrate, at a point outside the depletion region. Thus both frontside and backside contacts can be used for backside biasing to fully deplete the substrate. Also, high resistivity gaps around the CCD channels and electrically floating channel stop regions can be provided in the CCD array around the CCD channels. The CCD array forms an imaging sensor useful in astronomy.

• Research Organization: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
• DOE Contract Number: AC03-76SF00098
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 6259085
• OSTI ID: 873848
• Country of Publication: United States
• Language: English

Related Subjects

depleted
illuminated
ccd
backside
charge
coupled
device
formed
relatively
thick
resistivity
photon
sensitive
silicon
substrate
frontside
electronic
circuitry
optically
transparent
ohmic
contact
applying
voltage
sufficient
substantially
deplete
bias
overdepletes
applied
physically
connecting
source
alternate
connect
outside
depletion
region
contacts
biasing
gaps
channels
electrically
floating
channel
stop
regions
provided
array
forms
imaging
sensor
useful
astronomy
optically transparent
electronic circuit
charge coupled
coupled device
relatively thick
voltage source
silicon substrate
electronic circuitry
ohmic contact
bias voltage
sensitive silicon
ccd array
photon sensitive
resistivity photon
electrically floating
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