Microelectromechanical ratcheting apparatus

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:873650

Barnes, Stephen M ^[1]; Miller, Samuel L ^[1]; Jensen, Brian D ^[1]; Rodgers, M Steven ^[1]; Burg, Michael S ^[1]

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1. Albuquerque, NM

A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6211599
• OSTI ID: 873650
• Country of Publication: United States
• Language: English

Related Subjects

microelectromechanical
ratcheting
apparatus
disclosed
electrostatic
thermal
actuator
drives
moveable
form
gear
stage
rack
motion
effected
reciprocating
pawls
driven
direction
parallel
line
tangential
path
engage
indexing
elements
teeth
pins
incrementally
move
curved
straight
ability
precisely
control
determine
position
formed
silicon
substrate
conventional
surface
micromachining
methods
silicon substrate
surface micromachining
thermal actuator
ratcheting apparatus
micromachining method
precisely control
machining method
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