Apparatus and method for the determination of grain size in thin films
Patent
·
OSTI ID:873571
- Barrington, RI
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
- Research Organization:
- Brown Univ., Providence, RI (United States)
- DOE Contract Number:
- FG02-86ER45267
- Assignee:
- Brown University Research Foundation (Providence, RI)
- Patent Number(s):
- US 6191855
- OSTI ID:
- 873571
- Country of Publication:
- United States
- Language:
- English
Similar Records
Apparatus and method for the determination of grain size in thin films
Apparatus and method for the determination of grain size in thin films
Optical method for the determination of grain orientation in films
Patent
·
Tue Mar 14 00:00:00 EST 2000
·
OSTI ID:873571
Apparatus and method for the determination of grain size in thin films
Patent
·
Sat Jan 01 00:00:00 EST 2000
·
OSTI ID:873571
Optical method for the determination of grain orientation in films
Patent
·
Tue May 13 00:00:00 EDT 2003
·
OSTI ID:873571