Resistive hydrogen sensing element
- Oak Ridge, TN
Systems and methods are described for providing a hydrogen sensing element with a more robust exposed metallization by application of a discontinuous or porous overlay to hold the metallization firmly on the substrate. An apparatus includes: a substantially inert, electrically-insulating substrate; a first Pd containing metallization deposited upon the substrate and completely covered by a substantially hydrogen-impermeable layer so as to form a reference resistor on the substrate; a second Pd containing metallization deposited upon the substrate and at least a partially accessible to a gas to be tested, so as to form a hydrogen-sensing resistor; a protective structure disposed upon at least a portion of the second Pd containing metallization and at least a portion of the substrate to improve the attachment of the second Pd containing metallization to the substrate while allowing the gas to contact said the second Pd containing metallization; and a resistance bridge circuit coupled to both the first and second Pd containing metallizations. The circuit determines the difference in electrical resistance between the first and second Pd containing metallizations. The hydrogen concentration in the gas may be determined. The systems and methods provide advantages because adhesion is improved without adversely effecting measurement speed or sensitivity.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- Ut-Battelle, L.L.C. (Oak Ridge, TN)
- Patent Number(s):
- US 6114943
- OSTI ID:
- 873222
- Country of Publication:
- United States
- Language:
- English
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hydrogen
sensing
element
systems
methods
described
providing
robust
exposed
metallization
application
discontinuous
porous
overlay
hold
firmly
substrate
apparatus
substantially
inert
electrically-insulating
pd
containing
deposited
completely
covered
hydrogen-impermeable
layer
form
reference
resistor
partially
accessible
gas
tested
hydrogen-sensing
protective
structure
disposed
portion
improve
attachment
allowing
contact
resistance
bridge
circuit
coupled
metallizations
determines
difference
electrical
concentration
determined
provide
advantages
adhesion
improved
adversely
effecting
measurement
speed
sensitivity
substantially inert
hydrogen concentration
electrical resistance
sensing element
bridge circuit
provide advantages
containing metal
structure disposed
methods provide
metallization deposited
circuit coupled
circuit determines
insulating substrate
electrically-insulating substrate
completely cover
hydrogen sensing
permeable layer
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