Supplemental heating of deposition tooling shields

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:873067

Ohlhausen, James A ^[1]; Peebles, Diane E ^[1]; Hunter, John A ^[1]; Eckelmeyer, Kenneth H ^[1]

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1. Albuquerque, NM

A method of reducing particle generation from the thin coating deposited on the internal surfaces of a deposition chamber which undergoes temperature variation greater than 100.degree. C. comprising maintaining the temperature variation of the internal surfaces low enough during the process cycle to keep thermal expansion stresses between the coating and the surfaces under 500 MPa. For titanium nitride deposited on stainless steel, this means keeping temperature variations under approximately 70.degree. C. in a chamber that may be heated to over 350.degree. C. during a typical processing operation. Preferably, a supplemental heater is mounted behind the upper shield and controlled by a temperature sensitive element which provides feedback control based on the temperature of the upper shield.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6083360
• OSTI ID: 873067
• Country of Publication: United States
• Language: English

Related Subjects

supplemental
heating
deposition
tooling
shields
method
reducing
particle
generation
coating
deposited
internal
surfaces
chamber
undergoes
temperature
variation
100
degree
comprising
maintaining
process
cycle
thermal
expansion
stresses
500
mpa
titanium
nitride
stainless
steel
means
keeping
variations
approximately
70
heated
350
typical
processing
operation
preferably
heater
mounted
upper
shield
controlled
sensitive
element
provides
feedback
control
based
temperature sensitive
internal surface
internal surfaces
temperature variations
deposition chamber
titanium nitride
thermal expansion
stainless steel
feedback control
reducing particle
provides feedback
temperature variation
sensitive element
comprising maintaining
expansion stresses
supplemental heat
/204/118/427/