Thermally-induced voltage alteration for integrated circuit analysis
- (Albuquerque, NM)
A thermally-induced voltage alteration (TIVA) apparatus and method are disclosed for analyzing an integrated circuit (IC) either from a device side of the IC or through the IC substrate to locate any open-circuit or short-circuit defects therein. The TIVA apparatus uses constant-current biasing of the IC while scanning a focused laser beam over electrical conductors (i.e. a patterned metallization) in the IC to produce localized heating of the conductors. This localized heating produces a thermoelectric potential due to the Seebeck effect in any conductors with open-circuit defects and a resistance change in any conductors with short-circuit defects, both of which alter the power demand by the IC and thereby change the voltage of a source or power supply providing the constant-current biasing. By measuring the change in the supply voltage and the position of the focused and scanned laser beam over time, any open-circuit or short-circuit defects in the IC can be located and imaged. The TIVA apparatus can be formed in part from a scanning optical microscope, and has applications for qualification testing or failure analysis of ICs.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6078183
- OSTI ID:
- 873048
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
voltage
alteration
integrated
circuit
analysis
tiva
apparatus
method
disclosed
analyzing
device
substrate
locate
open-circuit
short-circuit
defects
therein
constant-current
biasing
scanning
focused
laser
beam
electrical
conductors
patterned
metallization
produce
localized
heating
produces
thermoelectric
potential
due
seebeck
effect
resistance
change
alter
power
demand
source
supply
providing
measuring
position
scanned
time
located
imaged
formed
optical
microscope
applications
qualification
testing
failure
ics
supply voltage
voltage alteration
optical microscope
localized heating
focused laser
electrical conductors
laser beam
power supply
integrated circuit
electric potential
electrical conductor
failure analysis
open-circuit defects
resistance change
circuit analysis
defects therein
supply providing
thermally-induced voltage
patterned metal
power demand
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