Integrated sensing platform and method for improved quantitative and selective monitoring of chemical analytes in both liquid and gas phase
Patent
·
OSTI ID:873038
- Albuquerque, NM
- Cedar Crest, NM
By measuring two or more physical parameters of a thin sensing film which are altered when exposed to chemicals, more effective discrimination between chemicals can be achieved. In using more than one sensor, the sensors are preferably integrated on the same substrate so that they may measure the same thin film. Even more preferably, the sensors are provided orthogonal to one another so that they may measure the same portion of the thin film. These provisions reduce problems in discrimination arising from variations in thin films.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6076406
- OSTI ID:
- 873038
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
integrated
sensing
platform
method
improved
quantitative
selective
monitoring
chemical
analytes
liquid
gas
phase
measuring
physical
parameters
film
altered
exposed
chemicals
effective
discrimination
achieved
sensor
sensors
preferably
substrate
measure
provided
orthogonal
portion
provisions
reduce
arising
variations
films
physical parameter
gas phase
sensing film
physical parameters
/73/
sensing
platform
method
improved
quantitative
selective
monitoring
chemical
analytes
liquid
gas
phase
measuring
physical
parameters
film
altered
exposed
chemicals
effective
discrimination
achieved
sensor
sensors
preferably
substrate
measure
provided
orthogonal
portion
provisions
reduce
arising
variations
films
physical parameter
gas phase
sensing film
physical parameters
/73/