Plasma mixing glow discharge device for analytical applications
- Knoxville, TN
An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
- Patent Number(s):
- US 5896196
- OSTI ID:
- 872258
- Country of Publication:
- United States
- Language:
- English
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journal | February 1993 |
Enhanced methyl‐radical production in an Ar‐CH 4 pin‐hollow cathode discharge
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journal | April 1994 |
Effect of electron temperature on negative hydrogen ion production in a low‐pressure Ar discharge plasma with methane
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journal | September 1993 |
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Related Subjects
mixing
glow
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device
analytical
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instrument
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sample
enclosure
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chamber
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anode
divides
region
analysis
gas
inlet
outlet
provided
introduce
exhaust
rare
cathode
plurality
pins
projecting
geometric
pattern
exciting
producing
energy
electrons
pass
aperture
analyzed
placed
bombarded
metastable
atoms
extracted
mass
optical
spectrometer
coupled
analyze
resulting
light
emission
optical spectrometer
analysis region
rare gas
light emission
energy electrons
plasma discharge
discharge region
discharge device
gas inlet
glow discharge
chamber containing
energy electron
gas atoms
geometric pattern
analytical applications
plasma mixing
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