Thin film hydrogen sensor

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872216

Cheng, Yang-Tse ^[1]; Poli, Andrea A ^[2]; Meltser, Mark Alexander ^[3]

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1. Rochester Hills, MI
2. Livonia, MI
3. Pittsford, NY

A thin film hydrogen sensor, includes: a substantially flat ceramic substrate with first and second planar sides and a first substrate end opposite a second substrate end; a thin film temperature responsive resistor on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater on the second planar side of the substrate proximate to the first end.

• Research Organization: General Motors LLC, Detroit, MI (United States)
• DOE Contract Number: AC02-90CH10435
• Assignee: General Motors Corporation (Detroit, MI)
• Patent Number(s): US 5886614
• OSTI ID: 872216
• Country of Publication: United States
• Language: English

Related Subjects

film
hydrogen
sensor
substantially
flat
ceramic
substrate
planar
opposite
temperature
responsive
resistor
proximate
metal
fist
heater
hydrogen sensor
film hydrogen
film temperature
temperature responsive
substantially flat
ceramic substrate
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