Porous silicon structures with high surface area/specific pore size

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872190

Northrup, M Allen ^[1]; Yu, Conrad M ^[2]; Raley, Norman F ^[3]

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1. Berkeley, CA
2. Antioch, CA
3. Danville, CA

Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gasses in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5882496
• OSTI ID: 872190
• Country of Publication: United States
• Language: English

Related Subjects

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surface reaction
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heated reaction
subsequently desorb
thermopneumatic sensor-actuators
increase surface
electrophoresis devices
electrophoresis device
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