Solid source MOCVD system

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871889

Hubert, Brian N ^[1]; Wu, Xin Di ^[2]

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1. Yakima, WA
2. San Jose, CA

A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Regents of University of California (Los Alamos, NM)
• Patent Number(s): US 5820678
• OSTI ID: 871889
• Country of Publication: United States
• Language: English

Related Subjects

solid
source
mocvd
fabrication
superconducting
non-superconducting
oxide
films
provides
delivery
feeding
metalorganic
precursors
multi-component
chemical
vapor
deposition
multiple
cartridges
containing
tightly
packed
precursor
materials
contents
cartridge
ground
desired
rate
fed
vaporization
zone
reaction
chamber
film
conducting oxide
film deposition
oxide films
deposition chamber
chemical vapor
reaction zone
vapor deposition
oxide film
precursor material
precursor materials
superconducting oxide
solid source
organic precursors
organic precursor
vaporization zone
tightly packed
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