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Title: Scanning fluorescent microthermal imaging apparatus and method

Patent ·
OSTI ID:871312
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations

A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation ()
Patent Number(s):
US 5705821
OSTI ID:
871312
Country of Publication:
United States
Language:
English

References (10)

A Method of Detecting Hot Spots on Semiconductors using Liquid Crystals conference April 1981
Fluorescence of Europium Thenoyltrifluoroacetonate. I. Evaluation of Laser Threshold Parameters journal July 1963
Remote thermal imaging with 0.7‐μm spatial resolution using temperature‐dependent fluorescent thin flims journal January 1983
Quenching and Temperature Dependence of Fluorescence in Rare‐Earth Chelates journal June 1964
Microscopic fluorescent imaging of surface temperature profiles with 0.01 °C resolution journal May 1982
Intramolecular Energy Transfer in Rare Earth Chelates. Role of the Triplet State journal March 1961
Liquid Crystal Technique as a Failure Analysis Tool conference April 1980
An integrating detector for serial scan thermal imaging journal January 1982
The Effect of Temperature on Fluorescence of Solutions journal January 1959
Infrared Technology Fundamentals journal December 1976

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point-by-point
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scanning fluorescent
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thermal imaging
fluorescent microthermal
thermal map
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