Magnetic lens apparatus for a low-voltage high-resolution electron microscope

Patent · Mon Jan 01 00:00:00 EST 1996

OSTI ID:870631

Crewe, Albert V ^[1]

---

1. Palos Park, IL

A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: FG02-86ER60437
• Assignee: Arch Development Corporation (Chicago, IL)
• Patent Number(s): US 5563415
• OSTI ID: 870631
• Country of Publication: United States
• Language: English

Related Subjects

magnetic
lens
apparatus
low-voltage
high-resolution
electron
microscope
beam
charged
particles
accelerating
voltage
brought
focus
field
situated
target
position
comprises
electrically-conducting
coil
arranged
axis
pole
piece
extending
space
surrounded
sole
focusing
imaging
scanning
scanning electron
magnetic lens
electron microscope
focusing lens
apparatus comprises
charged particles
magnetic field
charged particle
lens apparatus
resolution imaging
apparatus comprise
target position
pole piece
accelerating voltage
magnetic pole
/250/