Simultaneous specimen and stage cleaning device for analytical electron microscope

Patent · Mon Jan 01 00:00:00 EST 1996

OSTI ID:870386

Zaluzec, Nestor J ^[1]

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1. Bolingbrook, IL

An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: W-31109-ENG-38
• Assignee: University of Chicago (Chicago, IL)
• Patent Number(s): US 5510624
• OSTI ID: 870386
• Country of Publication: United States
• Language: English

Related Subjects

simultaneous
specimen
stage
cleaning
device
analytical
electron
microscope
improved
method
apparatus
provided
interior
aem
comprising
plasma
chamber
containing
gas
air
lock
coupled
permitting
passage
maintaining
airtight
subjected
reactive
dc
rf
excited
mounted
air lock
electron microscope
improved method
specimen stage
plasma gas
plasma chamber
cleaning device
reactive plasma
permitting passage
analytical electron
specimen comprising
simultaneous specimen
gas plasma
tight chamber
active plasma
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